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   Federal Standard 209   Description about ISO 14644-37

The following compilation is intended as a highly concentrated insight into the contents of the remaining standards of the ISO 14644 series on general cleanroom technology.

ISO/DIS 14644-37 provides most welcome guidance for the acceptance and qualification tests of physical parameters as well as for the corresponding measuring activities related to process monitoring. It covers a total of 14 measurement tasks such as particle counting, air velocity measurements, filter integrity tests, flow visualisation and the measurement of recovery times.  In addition, the minimum performance requirement for the test instruments are specified systematically.

Measuring parameters covered by ISO/DIS 14644-3

Annex no. Measuring parameter
B. 1 Airborne particle count for classification and test measurement of cleanrooms and separative devices
B. 2 Airborne particle count for ultrafine particles
B. 3 Airborne particle count for macroparticles
B. 4 Airflow test
B. 5 Air pressure difference test
B. 6 Installed filter system leakage test
B. 7 Airflow visualisation
B. 8 Airflow direction test
B. 9 Temperature test
B. 10 Humidity test
B. 11 Electrostatic and ion generator test
B. 12 Particle deposition test
B. 13 Recovery test
B. 14 Containment leak test