| |
Cleanroom
Classification Formula from ISO Standard 14644-1
ISO 14644-1 gives a method to classify cleanrooms The classification
is based on the following equation:

where:
Cn
is the maximum permitted concentration (in particles/m3
of air) of airborne particles that are equal to, or larger, than
the considered particle size.
Cn is rounded to the nearest whole number, using no more
than three significant figures.
N
is the ISO classification number, which shall not exceed the value
of 9. Intermediate ISO classification numbers may be specified,
with 0.1 the smallest permitted increment of N.
D
is the considered particle size in µm.
0.1
is a constant with a dimension of µm.
From the equation, the maximum permitted airborne concentration of
particles, i.e. the class limit can be calculated for any given particle
size. Shown in table 2 are the classes selected by ISO 14644-1 to
illustrate class limits.
Table 2 Selected
ISO 14644-1 airborne particulate cleanliness classes for cleanrooms
and clean zones
| ISO Classification number |
Maximum concentration limits (particles/m3
of air) for particles equal to and larger than the considered
sizes shown below |
| |
>=0.1µm |
>=0.2µm |
>=0.3µm |
>=0.5µm |
>=1µm |
>=5.0µm |
| ISO Class 1 |
10 |
2 |
|
|
|
|
| ISO Class 2 |
100 |
24 |
10 |
4 |
|
|
| ISO Class 3 |
1 000 |
237 |
102 |
35 |
8 |
|
| ISO Class 4 |
10 000 |
2 370 |
1 020 |
352 |
83 |
|
| ISO Class 5 |
100 000 |
23 700 |
10 200 |
3 520 |
832 |
29 |
| ISO Class 6 |
1 000 000 |
237 000 |
102 000 |
35 200 |
8 320 |
293 |
| ISO Class 7 |
|
|
|
352 000 |
83 200 |
2 930 |
| ISO Class 8 |
|
|
|
3 520 000 |
832 000 |
29 300 |
| ISO Class 9 |
|
|
|
35 200 000 |
8 320 000 |
293 000 |
|
|
|
|
|
|
|
|
|
It should be noted that there is a crossover to the Federal Standard
209 classes. If the particle concentration/m3 in the ISO standard
is divided by 35.2 the count is converted to counts/ft3 . The equivalent
Federal Standard 209 classification is then found at the 0.5 µm
size, e.g. an ISO Class 5 is equivalent to Federal Standard 209
Class 100. A comparison in given in table 3.
Table 3. Comparison
between selected equivalent classes of FS 209 and ISO 14644-1
| ISO 14644-1Classes |
Class 3 |
Class 4 |
Class 5 |
Class 6 |
Class 7 |
Class 8 |
| FS 209Classes |
Class1 |
Class 10 |
Class 100 |
Class 1000 |
Class 10 000 |
Class 6100 000 |
It should be appreciated
that the airborne particle concentration of a given cleanroom is
dependent on the particle generating activities going on in the
room. If a room is empty, a very low particle concentration can
be achieved, this closely reflecting the quality of air supplied.
If the room has in it production equipment that is operating, there
should be a greater particle concentration, but the greatest concentration
occurs when the room is in full production. The classification of
the room may therefore be carried out in these different occupancy
states. The occupancy states defined in ISO 14644-1 are as follows:
As built:
the condition where the installation is complete with all services
connected and functioning, but with no production equipment, materials
or personnel present.
At-rest:
The condition where the installation is complete with equipment
installed and operating in a manner agreed between the customer
and supplier, but with no personnel present.
Operational:
The condition where the installation is functioning in the specified
manner, with the specified number of personnel present and working
in the manner agreed upon.
The ISO 14644-1 standard also gives a method by which the classification
of a cleanroom is ascertained. The method is for determining the number
of sampling locations, the sampling volume and counting the number
of airborne particles. |
|