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Auger Electron Spectroscopy (AES)
An alternative surface analysis that can detect all elements with an atomic number greater than that of helium with the additional ability to analyze sub micron-diameter features. It is not as quantitative as ESCA and cannot determine the chemical state of an element. The primary advantage of Auger is that when combined with etching, a chemical depth profile can be measured rapidly and can image the distribution on the surface of spatial limitation resolution of 100 to 1,000 angstroms (depending on the equipment capability)