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Frequently Asked Question - Cleanroom Section
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Federal Standard 209E Cleanroom Class Limits
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Class Limits
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Class Name
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>= 0.1µm
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>=0.2µm
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>= 0.3µm
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>= 0.5µm
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>=5.0µm
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Volume Units
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SI
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English
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m3
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ft3
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m3
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ft3
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m3
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ft3
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m3
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ft3
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m3
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ft3
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M 1
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350
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9.91
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75.7
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2.14
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30.9
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0.875
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10.0
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0.283
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--
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--
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M 1.5
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1
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1240
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35
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265
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7.50
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106
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3.00
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35.3
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1.00
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--
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--
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M 2
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3500
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99.1
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757
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21.4
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309
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8.75
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100
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2.83
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--
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--
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M 2.5
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10
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12400
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350
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2650
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75.0
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1060
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30.0
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353
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10.0
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--
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--
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M 3
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35000
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991
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7570
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214
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3090
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87.5
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1000
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28.3
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--
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--
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M 3.5
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100
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--
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--
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26500
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750
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10600
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300
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3530
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100
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--
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--
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M 4
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--
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--
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75700
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2140
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30900
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875
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10000
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283
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--
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--
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M 4.5
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1000
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--
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--
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--
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--
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--
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--
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35300
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1000
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247
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7.00
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M 5
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|
--
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--
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--
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--
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--
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--
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100000
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2830
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618
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17.5
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M 5.5
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10000
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--
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--
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--
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--
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--
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--
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353000
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10000
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2470
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70.0
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M 6
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--
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--
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--
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--
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--
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--
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1000000
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28300
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6180
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175
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M 6.5
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100000
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--
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--
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--
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--
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--
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--
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3350000
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100000
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24700
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700
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M 7
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--
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--
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--
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--
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--
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--
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10000000
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283000
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61800
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1750
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