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Federal Standard 209
Cleanrooms are classified
by the cleanliness of their air. This is done according to ISO 14644-1.
This is an international standard, and was adopted by the European
Union in 1999, and the USA in
2001. However, the most easily understood classification of cleanrooms
is the obsolete Federal Standard 209 of the USA;
it is still widely used.
Federal Standard 209
The first Federal Standard 209 was published in 1963 in the USA,
and titled "Cleanroom and Work Station Requirements, Controlled
Environments". It was revised in 1966 (209A), 1973 (B), 1987 (C),
1988 (D) and 1992 (E), and withdrawn in 2001. The cleanroom class
limits, given in the earlier 209 A to D versions, are shown in table
1. The class of a cleanroom is found by measuring the number of
particles 0.5 m in one cubic foot of room air, and determining which
class limit is not exceeded; this is the cleanroom classification.
Table 1 Federal
Standard 209 class limits
|
Class
|
|
Particles
|
/ ft3
|
|
|
| |
>= 0.1 µm
|
>= 0.2 µm
|
>= 0.3 µm
|
>= 0.5 µm
|
>= 5.0 µm
|
|
1
|
35
|
7.5
|
3
|
1
|
NA
|
|
10
|
350
|
75
|
30
|
10
|
NA
|
|
100
|
NA
|
750
|
300
|
100
|
NA
|
|
1,000
|
NA
|
NA
|
NA
|
1,000
|
7
|
|
10,000
|
NA
|
NA
|
NA
|
10,000
|
70
|
|
100,000
|
NA
|
NA
|
NA
|
100,000
|
700
|
In the last edition
of Federal Standard 209 (E) the airborne concentrations in the room
was also given in metric units, i.e. per m3 . This nomenclature
never became established, and was only used in the occasional published
article. The earlier version's nomenclature shown in table 1 continues
to be used and is likely to be used for many years.
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